Index of content:
Volume 87, Issue 7, 01 April 2000
- PLASMAS AND ELECTRICAL DISCHARGES (PACS 51-52)
Nonprobe radio-frequency plasma diagnostics method based on the power balance in an asymmetric capacitively coupled discharge87(2000); http://dx.doi.org/10.1063/1.372334View Description Hide Description
An analytical semiquantitative theoretical model founded on the self-bias voltage dependence on the absorbed radio-frequency (rf) power of a strongly asymmetric capacitively coupled rf discharge has been developed. The model is applicable under gas-discharge conditions typical of technological etching devices and suggests an experimental method for determining basic plasma parameters, more specifically the ion flux onto the powered electrode, without using any additional probes.
87(2000); http://dx.doi.org/10.1063/1.372335View Description Hide Description
We study the time and space resolved energy of charged particles emitted from the plasma formed on the surface of polarized and unpolarized ferroelectric cathodes under the application of driving pulses having either a positive or negative polarity. It is found that the energy of the emitted charged particles does not exceed the amplitude of the driving voltage and is independent of the initial polarization state of the ferroelectric. In addition, data concerning the energy of the electrons under the application of an accelerating pulse of 25 kV, and data concerning the electron beam uniformity and the time resolved potential distribution inside the anode–cathode gap of the electron diode are presented. We discuss our experimental results within the framework of the incomplete surface discharge model.
87(2000); http://dx.doi.org/10.1063/1.372336View Description Hide Description
The regime of burning of a high-pressure arc is considered when its positive column contains an admixture of a heat-resistant metal, which is located in the form of a gaseous compound near walls of the discharge tube and metallic clusters in a hot region of this discharge. Criteria of this discharge regime are given. A cluster instability leads to the growth of metallic clusters in an intermediate region of the discharge. This instability is a basis for separation of a heat-resistant metal in the plasma from its chemical compounds.