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Effects of donor concentration on transient enhanced diffusion of boron in silicon
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10.1063/1.372402
/content/aip/journal/jap/87/8/10.1063/1.372402
http://aip.metastore.ingenta.com/content/aip/journal/jap/87/8/10.1063/1.372402
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/content/aip/journal/jap/87/8/10.1063/1.372402
2000-04-15
2014-04-17
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Effects of donor concentration on transient enhanced diffusion of boron in silicon
http://aip.metastore.ingenta.com/content/aip/journal/jap/87/8/10.1063/1.372402
10.1063/1.372402
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