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Threading dislocation evolution in mega-electron-volt phosphorus implanted silicon
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10.1063/1.1351865
/content/aip/journal/jap/89/8/10.1063/1.1351865
http://aip.metastore.ingenta.com/content/aip/journal/jap/89/8/10.1063/1.1351865
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/content/aip/journal/jap/89/8/10.1063/1.1351865
2001-04-15
2014-09-22
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Threading dislocation evolution in mega-electron-volt phosphorus implanted silicon
http://aip.metastore.ingenta.com/content/aip/journal/jap/89/8/10.1063/1.1351865
10.1063/1.1351865
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