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Clustering equilibrium and deactivation kinetics in arsenic doped silicon
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10.1063/1.1377607
/content/aip/journal/jap/90/1/10.1063/1.1377607
http://aip.metastore.ingenta.com/content/aip/journal/jap/90/1/10.1063/1.1377607
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/content/aip/journal/jap/90/1/10.1063/1.1377607
2001-07-01
2014-08-23
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Scitation: Clustering equilibrium and deactivation kinetics in arsenic doped silicon
http://aip.metastore.ingenta.com/content/aip/journal/jap/90/1/10.1063/1.1377607
10.1063/1.1377607
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