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Spectroscopic ellipsometry and electrical studies of as-grown and rapid thermal oxidized films
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10.1063/1.1413715
/content/aip/journal/jap/90/11/10.1063/1.1413715
http://aip.metastore.ingenta.com/content/aip/journal/jap/90/11/10.1063/1.1413715
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/content/aip/journal/jap/90/11/10.1063/1.1413715
2001-12-01
2014-04-21
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Spectroscopic ellipsometry and electrical studies of as-grown and rapid thermal oxidized Si1−x−yGexCy films
http://aip.metastore.ingenta.com/content/aip/journal/jap/90/11/10.1063/1.1413715
10.1063/1.1413715
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