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Noncollisional heating and electron energy distributions in magnetically enhanced inductively coupled and helicon plasma sources
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10.1063/1.1400091
/content/aip/journal/jap/90/8/10.1063/1.1400091
http://aip.metastore.ingenta.com/content/aip/journal/jap/90/8/10.1063/1.1400091
/content/aip/journal/jap/90/8/10.1063/1.1400091
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/content/aip/journal/jap/90/8/10.1063/1.1400091
2001-10-15
2014-09-18
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Noncollisional heating and electron energy distributions in magnetically enhanced inductively coupled and helicon plasma sources
http://aip.metastore.ingenta.com/content/aip/journal/jap/90/8/10.1063/1.1400091
10.1063/1.1400091
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