1887
banner image
No data available.
Please log in to see this content.
You have no subscription access to this content.
No metrics data to plot.
The attempt to load metrics for this article has failed.
The attempt to plot a graph for these metrics has failed.
The full text of this article is not currently available.
Comparison of a one-dimensional particle-in-cell–Monte Carlo model and a one-dimensional fluid model for a capacitively coupled radio frequency discharge
Rent:
Rent this article for
USD
10.1063/1.1461895
/content/aip/journal/jap/91/10/10.1063/1.1461895
http://aip.metastore.ingenta.com/content/aip/journal/jap/91/10/10.1063/1.1461895
/content/aip/journal/jap/91/10/10.1063/1.1461895
Loading

Data & Media loading...

Loading

Article metrics loading...

/content/aip/journal/jap/91/10/10.1063/1.1461895
2002-05-13
2015-07-06
Loading

Full text loading...

This is a required field
Please enter a valid email address

Oops! This section does not exist...

Use the links on this page to find existing content.

752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Comparison of a one-dimensional particle-in-cell–Monte Carlo model and a one-dimensional fluid model for a CH4/H2 capacitively coupled radio frequency discharge
http://aip.metastore.ingenta.com/content/aip/journal/jap/91/10/10.1063/1.1461895
10.1063/1.1461895
SEARCH_EXPAND_ITEM