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Characterization on microstructures of tungsten/barrier metals multilayer films
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10.1063/1.1479753
/content/aip/journal/jap/91/12/10.1063/1.1479753
http://aip.metastore.ingenta.com/content/aip/journal/jap/91/12/10.1063/1.1479753
/content/aip/journal/jap/91/12/10.1063/1.1479753
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/content/aip/journal/jap/91/12/10.1063/1.1479753
2002-05-30
2014-10-25
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Characterization on microstructures of tungsten/barrier metals (TiN,WNx)/silicon multilayer films
http://aip.metastore.ingenta.com/content/aip/journal/jap/91/12/10.1063/1.1479753
10.1063/1.1479753
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