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Ultrathin oxide interfaces on 6H–SiC formed by plasma hydrogenation: Ultra shallow depth profile study
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10.1063/1.1509100
/content/aip/journal/jap/92/9/10.1063/1.1509100
http://aip.metastore.ingenta.com/content/aip/journal/jap/92/9/10.1063/1.1509100
/content/aip/journal/jap/92/9/10.1063/1.1509100
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/content/aip/journal/jap/92/9/10.1063/1.1509100
2002-10-21
2015-03-01
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Ultrathin oxide interfaces on 6H–SiC formed by plasma hydrogenation: Ultra shallow depth profile study
http://aip.metastore.ingenta.com/content/aip/journal/jap/92/9/10.1063/1.1509100
10.1063/1.1509100
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