1887
banner image
No data available.
Please log in to see this content.
You have no subscription access to this content.
No metrics data to plot.
The attempt to load metrics for this article has failed.
The attempt to plot a graph for these metrics has failed.
The full text of this article is not currently available.
Ultrathin oxide interfaces on 6H–SiC formed by plasma hydrogenation: Ultra shallow depth profile study
Rent:
Rent this article for
USD
10.1063/1.1509100
/content/aip/journal/jap/92/9/10.1063/1.1509100
http://aip.metastore.ingenta.com/content/aip/journal/jap/92/9/10.1063/1.1509100
/content/aip/journal/jap/92/9/10.1063/1.1509100
Loading

Data & Media loading...

Loading

Article metrics loading...

/content/aip/journal/jap/92/9/10.1063/1.1509100
2002-10-21
2014-10-24
Loading

Full text loading...

This is a required field
Please enter a valid email address
752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Ultrathin oxide interfaces on 6H–SiC formed by plasma hydrogenation: Ultra shallow depth profile study
http://aip.metastore.ingenta.com/content/aip/journal/jap/92/9/10.1063/1.1509100
10.1063/1.1509100
SEARCH_EXPAND_ITEM