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Dopant deactivation in heavily Sb doped Si (001): A high-resolution x-ray diffraction and transmission electron microscopy study
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10.1063/1.1510953
/content/aip/journal/jap/92/9/10.1063/1.1510953
http://aip.metastore.ingenta.com/content/aip/journal/jap/92/9/10.1063/1.1510953
/content/aip/journal/jap/92/9/10.1063/1.1510953
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/content/aip/journal/jap/92/9/10.1063/1.1510953
2002-10-21
2014-09-21
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Dopant deactivation in heavily Sb doped Si (001): A high-resolution x-ray diffraction and transmission electron microscopy study
http://aip.metastore.ingenta.com/content/aip/journal/jap/92/9/10.1063/1.1510953
10.1063/1.1510953
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