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High rate deposition of diamond like carbon films by very high frequency plasma enhanced chemical vapor deposition at 100 MHz
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10.1063/1.1561997
/content/aip/journal/jap/93/10/10.1063/1.1561997
http://aip.metastore.ingenta.com/content/aip/journal/jap/93/10/10.1063/1.1561997
/content/aip/journal/jap/93/10/10.1063/1.1561997
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/content/aip/journal/jap/93/10/10.1063/1.1561997
2003-05-09
2014-07-24
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: High rate deposition of diamond like carbon films by very high frequency plasma enhanced chemical vapor deposition at 100 MHz
http://aip.metastore.ingenta.com/content/aip/journal/jap/93/10/10.1063/1.1561997
10.1063/1.1561997
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