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Effect of on the formation of titanium silicide layer
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10.1063/1.1568534
/content/aip/journal/jap/93/12/10.1063/1.1568534
http://aip.metastore.ingenta.com/content/aip/journal/jap/93/12/10.1063/1.1568534
/content/aip/journal/jap/93/12/10.1063/1.1568534
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/content/aip/journal/jap/93/12/10.1063/1.1568534
2003-05-30
2014-08-21
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Effect of TiOx on the formation of titanium silicide layer
http://aip.metastore.ingenta.com/content/aip/journal/jap/93/12/10.1063/1.1568534
10.1063/1.1568534
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