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Morphology and crystallization kinetics in thin films grown by atomic layer deposition
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10.1063/1.1534381
/content/aip/journal/jap/93/3/10.1063/1.1534381
http://aip.metastore.ingenta.com/content/aip/journal/jap/93/3/10.1063/1.1534381
/content/aip/journal/jap/93/3/10.1063/1.1534381
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/content/aip/journal/jap/93/3/10.1063/1.1534381
2003-02-06
2014-07-31
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Morphology and crystallization kinetics in HfO2 thin films grown by atomic layer deposition
http://aip.metastore.ingenta.com/content/aip/journal/jap/93/3/10.1063/1.1534381
10.1063/1.1534381
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