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Unoxidized porous Si as an isolation material for mixed-signal integrated circuit applications
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10.1063/1.1555700
/content/aip/journal/jap/93/7/10.1063/1.1555700
http://aip.metastore.ingenta.com/content/aip/journal/jap/93/7/10.1063/1.1555700
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/content/aip/journal/jap/93/7/10.1063/1.1555700
2003-03-21
2014-04-25
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Unoxidized porous Si as an isolation material for mixed-signal integrated circuit applications
http://aip.metastore.ingenta.com/content/aip/journal/jap/93/7/10.1063/1.1555700
10.1063/1.1555700
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