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Annealing of amorphous Ru–Si–O and Ir–Si–O films in vacuum or dry oxygen
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6.A new absolute measurement of the calibration sample of the stylus instrument employed by Gasser et al. has revealed a systematic error of about 10% in direction of under-estimating the actual thickness of a film. The published value of may thus be 10% too high.
7.In Figs. 3, 4, and 11, the backscattering spectra were recorded with a fixed total dose of incident particles that was controlled by a reference signal derived from the incident beam with a chopper wheel [F. H. Eisen and M.-A. Nicolet, Nucl. Inst. Meth. B (submitted)]. The spectra are reproduced as they were recorded, without any subsequent adjustments.
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