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Transmission electron microscopy study of damaged layer on GaAs surface induced by low-energy ion irradiation
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10.1063/1.1619191
/content/aip/journal/jap/94/10/10.1063/1.1619191
http://aip.metastore.ingenta.com/content/aip/journal/jap/94/10/10.1063/1.1619191
/content/aip/journal/jap/94/10/10.1063/1.1619191
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/content/aip/journal/jap/94/10/10.1063/1.1619191
2003-10-31
2014-10-31
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Transmission electron microscopy study of damaged layer on GaAs surface induced by low-energy ion irradiation
http://aip.metastore.ingenta.com/content/aip/journal/jap/94/10/10.1063/1.1619191
10.1063/1.1619191
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