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Strain determination in silicon microstructures by combined convergent beam electron diffraction, process simulation, and micro-Raman spectroscopy
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10.1063/1.1611287
/content/aip/journal/jap/94/9/10.1063/1.1611287
http://aip.metastore.ingenta.com/content/aip/journal/jap/94/9/10.1063/1.1611287
/content/aip/journal/jap/94/9/10.1063/1.1611287
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/content/aip/journal/jap/94/9/10.1063/1.1611287
2003-10-23
2014-12-18
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Strain determination in silicon microstructures by combined convergent beam electron diffraction, process simulation, and micro-Raman spectroscopy
http://aip.metastore.ingenta.com/content/aip/journal/jap/94/9/10.1063/1.1611287
10.1063/1.1611287
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