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Manipulation of two-dimensional arrays of Si nanocrystals embedded in thin layers by low energy ion implantation
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10.1063/1.1695594
/content/aip/journal/jap/95/10/10.1063/1.1695594
http://aip.metastore.ingenta.com/content/aip/journal/jap/95/10/10.1063/1.1695594
/content/aip/journal/jap/95/10/10.1063/1.1695594
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/content/aip/journal/jap/95/10/10.1063/1.1695594
2004-05-06
2014-07-29
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Manipulation of two-dimensional arrays of Si nanocrystals embedded in thin SiO2 layers by low energy ion implantation
http://aip.metastore.ingenta.com/content/aip/journal/jap/95/10/10.1063/1.1695594
10.1063/1.1695594
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