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Fluid modeling of electron heating in low-pressure, high-frequency capacitively coupled plasma discharges
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10.1063/1.1818354
/content/aip/journal/jap/96/11/10.1063/1.1818354
http://aip.metastore.ingenta.com/content/aip/journal/jap/96/11/10.1063/1.1818354
/content/aip/journal/jap/96/11/10.1063/1.1818354
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/content/aip/journal/jap/96/11/10.1063/1.1818354
2004-11-22
2014-09-18
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Fluid modeling of electron heating in low-pressure, high-frequency capacitively coupled plasma discharges
http://aip.metastore.ingenta.com/content/aip/journal/jap/96/11/10.1063/1.1818354
10.1063/1.1818354
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