1887
banner image
No data available.
Please log in to see this content.
You have no subscription access to this content.
No metrics data to plot.
The attempt to load metrics for this article has failed.
The attempt to plot a graph for these metrics has failed.
Physics of high-pressure helium and argon radio-frequency plasmas
Rent:
Rent this article for
USD
10.1063/1.1815047
/content/aip/journal/jap/96/12/10.1063/1.1815047
http://aip.metastore.ingenta.com/content/aip/journal/jap/96/12/10.1063/1.1815047
View: Figures

Figures

Image of FIG. 1.
FIG. 1.

Schematic of the experimental apparatus (not to scale) and picture of the plasma source.

Image of FIG. 2.
FIG. 2.

Optical emission spectra of UHP helium at with and without additional purification.

Image of FIG. 3.
FIG. 3.

Paschen curves for helium and argon rf discharges.

Image of FIG. 4.
FIG. 4.

Current and voltage wave forms for at and .

Image of FIG. 5.
FIG. 5.

Current and voltage wave forms for at and .

Image of FIG. 6.
FIG. 6.

Voltages as a function of current for a discharge at different pressures.

Image of FIG. 7.
FIG. 7.

Voltages as a function of current for an discharge at various pressures.

Image of FIG. 8.
FIG. 8.

Voltages as a function of current for a plasma at various pressures.

Image of FIG. 9.
FIG. 9.

Electron density and temperature for the helium and argon plasmas as a function of pressure at a constant current density of .

Loading

Article metrics loading...

/content/aip/journal/jap/96/12/10.1063/1.1815047
2004-12-02
2014-04-19
Loading

Full text loading...

This is a required field
Please enter a valid email address
752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Physics of high-pressure helium and argon radio-frequency plasmas
http://aip.metastore.ingenta.com/content/aip/journal/jap/96/12/10.1063/1.1815047
10.1063/1.1815047
SEARCH_EXPAND_ITEM