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Small angle x-ray scattering metrology for sidewall angle and cross section of nanometer scale line gratings
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View: Figures


Image of FIG. 1.
FIG. 1.

SEM micrograph of the grating patterns with and of focus depth deviation from optimal imaging conditions.

Image of FIG. 2.
FIG. 2.

Schematic of the small angle x-ray scattering geometry illustrating the scattering angle , the sample rotation angle , and sample sidewall angle .

Image of FIG. 3.
FIG. 3.

Contour plot of the scattering intensity based on the analytical form factor for a trapezoidal cross section on the plane. The lattice points of an equally spaced grating are given as a set of vertical lines. The Ewald sphere is approximately depicted as a straight line at a rotation angle . The dimensions of the trapezoid used in this calculation are: , width at , sidewall angle , repeat of the . A 3D presentation of the above contour plot of the form factor alone is also given.

Image of FIG. 4.
FIG. 4.

Experimental data of sample A and the corresponding theoretically calculated peak intensities of the fifth order diffraction at different rotation angles.

Image of FIG. 5.
FIG. 5.

Calculated rotation angle dependence of the diffraction peak intensities at three different diffraction orders. The sidewall angle in the model is 5.0°.

Image of FIG. 6.
FIG. 6.

Diffraction peak positions of the maxima and minima intensities of sample A in the plane. Lines are drawn to connect the observed maxima.


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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Small angle x-ray scattering metrology for sidewall angle and cross section of nanometer scale line gratings