SEM micrograph of the grating patterns with and of focus depth deviation from optimal imaging conditions.
Schematic of the small angle x-ray scattering geometry illustrating the scattering angle , the sample rotation angle , and sample sidewall angle .
Contour plot of the scattering intensity based on the analytical form factor for a trapezoidal cross section on the plane. The lattice points of an equally spaced grating are given as a set of vertical lines. The Ewald sphere is approximately depicted as a straight line at a rotation angle . The dimensions of the trapezoid used in this calculation are: , width at , sidewall angle , repeat of the . A 3D presentation of the above contour plot of the form factor alone is also given.
Experimental data of sample A and the corresponding theoretically calculated peak intensities of the fifth order diffraction at different rotation angles.
Calculated rotation angle dependence of the diffraction peak intensities at three different diffraction orders. The sidewall angle in the model is 5.0°.
Diffraction peak positions of the maxima and minima intensities of sample A in the plane. Lines are drawn to connect the observed maxima.
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