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Real-time spectroscopic ellipsometry study of ultrathin diffusion barriers for integrated circuits
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10.1063/1.1784621
/content/aip/journal/jap/96/7/10.1063/1.1784621
http://aip.metastore.ingenta.com/content/aip/journal/jap/96/7/10.1063/1.1784621
/content/aip/journal/jap/96/7/10.1063/1.1784621
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/content/aip/journal/jap/96/7/10.1063/1.1784621
2004-09-23
2014-08-21
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Real-time spectroscopic ellipsometry study of ultrathin diffusion barriers for integrated circuits
http://aip.metastore.ingenta.com/content/aip/journal/jap/96/7/10.1063/1.1784621
10.1063/1.1784621
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