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Surface-roughness correlations in homoepitaxial growth of films by supersonic jet epitaxy
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10.1063/1.1785869
/content/aip/journal/jap/96/8/10.1063/1.1785869
http://aip.metastore.ingenta.com/content/aip/journal/jap/96/8/10.1063/1.1785869

Figures

Image of FIG. 1.
FIG. 1.

(a) Growth rates of films by SJE at using a flux of and varying the seeding percentage in ; (b) measured flux at the substrate for various seeding percentages in and .

Image of FIG. 2.
FIG. 2.

AFM images of films grown by SJE using seeded in : (a) 1% , growth rate , and grayscale ; (b) 2% , growth rate , and grayscale ; (c) 3% , growth rate , and grayscale ; (d) 3% , growth rate , and grayscale . Films were grown for except (d) .

Image of FIG. 3.
FIG. 3.

RHEED patterns of films grown by SJE: (a) using 3% in He for ; (b) using 1% in for .

Image of FIG. 4.
FIG. 4.

SEM images of films grown using supersonic beams of 50 and 20% seeded in for (a) 2 and (b) , respectively. The film thicknesses are (a) 98 and (b) .

Image of FIG. 5.
FIG. 5.

AFM images of films grown by SJE using seeded in : (a) 1% , growth rate , and grayscale ; (b) 1% , growth rate , and grayscale ; (c) 2% , growth rate , and grayscale ; (d) 1% , growth rate , and grayscale . Films wre grown for except (d) .

Image of FIG. 6.
FIG. 6.

The rms roughness ( image size) of films grown by SJE using supersonic beams of ∎ , ▴ seeded in , and seeded in vs normalized growth rate .

Image of FIG. 7.
FIG. 7.

Static scaling analysis of smooth and rough films grown by SJE. For , the roughness saturates. For , the slope of log vs log yields the static scaling coefficient . Intersection of this line and constant determines the critical scaling length, . The rough film exhibiting and was grown with a supersonic beam. The smooth film exhibiting and was grown with a 1% in beam.

Image of FIG. 8.
FIG. 8.

Static scaling analysis of films grown by SJE: substrate after cleaning; 1% in ; 1% in ; 1% in ; 2% in ; 3% in ; 2% in ; 2% in .

Image of FIG. 9.
FIG. 9.

Static scaling analyis (in dimensionless form) of films grown by using supersonic beams of seeded in (a) and (b) . The rms roughness and the length scale have been normalized by and , respectively.

Tables

Generic image for table
Table I.

Predicted values of the static and dynamic scaling exponents for selected continuum growth models.17

Generic image for table
Table II.

Growth conditions and roughness scaling parameters for homoepitaxial films grown at for (unless otherwise noted).

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/content/aip/journal/jap/96/8/10.1063/1.1785869
2004-10-04
2014-04-25
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Surface-roughness correlations in homoepitaxial growth of GaN(0001) films by NH3 supersonic jet epitaxy
http://aip.metastore.ingenta.com/content/aip/journal/jap/96/8/10.1063/1.1785869
10.1063/1.1785869
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