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Radiofrequency sheath fields above a metal-dielectric interface
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10.1063/1.1794901
/content/aip/journal/jap/96/9/10.1063/1.1794901
http://aip.metastore.ingenta.com/content/aip/journal/jap/96/9/10.1063/1.1794901
View: Figures

Figures

Image of FIG. 1.
FIG. 1.

Experimental setup of the calibration cell used to independently measure the Stark-shifted Rydberg state of argon.

Image of FIG. 2.
FIG. 2.

(a) Laser excitation of argon state to an intermediate state and subsequent signal yielded from fluorescence. (b) Transfer of a portion of the excited state to a Stark-shifted Rydberg level and subsequent reduction in observed fluorescence.

Image of FIG. 3.
FIG. 3.

(a) Stark-shifted LIF spectrum centered around for a field magnitude of (circle), (triangle), (square), and (diamond). The arrow indicates the position of the level. (b) The Stark-shifted peak positions plotted as a function of the applied field.

Image of FIG. 4.
FIG. 4.

Setup used to temporally and spatially map the electric fields in an argon rf discharge generated above a specially designed electrode containing a dielectric surface inserted into a milled steel electrode.

Image of FIG. 5.
FIG. 5.

(Color) Spatial maps of the electric fields above a metal-dielectric junction formed in an argon discharge ( argon excited by at ) for various portions of the rf phase: (a) , (b) , (c) , (d) , and (e) . Included with each map is a spatially averaged (averaged over away from the junction) fields and potentials above the conducting (∎) and insulating surfaces (▿).

Image of FIG. 6.
FIG. 6.

Measured temporal evolution of the surface potentials of the conducting surface (filled circles) and insulating surfaces (open circles) compared to the measured rf excitation (dashed line). Also plotted is the calculated surface charge accumulated on the dielectric (triangles) for the various portions of the rf cycle. ( argon excited by at .)

Image of FIG. 7.
FIG. 7.

(Color) Structure of the spatially averaged fields and potentials above the conducting (open circles) and insulating (filled circles) surfaces for a (a) , (b) , and (c) argon discharge driven at .

Image of FIG. 8.
FIG. 8.

(Color) Structure of the spatially averaged fields and potentials above the conducting (open circles) and insulating (filled circles) surfaces for a argon discharge excited by (a) , (b) , and (c) .

Image of FIG. 9.
FIG. 9.

(Color) The electrical potential from the surface as a function across the electrode and the sigmoid fit used to describe the functional dependence of the horizontal structure for a , argon discharge.  and .

Image of FIG. 10.
FIG. 10.

(Color) Estimated (a) vertical and (b) horizontal components of the electric fields above the metal-dielectric junction as extracted from the measured map of the electric field. ( argon discharge excited by .)

Image of FIG. 11.
FIG. 11.

Spatial distribution of (a) ion densities obtained with a cylindrical Langmuir probe taken above the electrode and (b) relative population obtained from LIF for argon pressures of , , and .

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/content/aip/journal/jap/96/9/10.1063/1.1794901
2004-10-28
2014-04-21
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Radiofrequency sheath fields above a metal-dielectric interface
http://aip.metastore.ingenta.com/content/aip/journal/jap/96/9/10.1063/1.1794901
10.1063/1.1794901
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