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10Modeling of cantilever deflection for sensors and actuators: Role of Poisson’s ratio for a unified theory
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10.1063/1.1829378
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Affiliations:
1 Coherentia-INFM and Dip.to di Scienze Fisiche, Università degli Studi di Napoli “Federico II”, Piazzale V. Tecchio 80, I-80125 Napoli, Italy
a) Electronic mail: iannotti@na.infn.it
J. Appl. Phys. 97, 104516 (2005)
/content/aip/journal/jap/97/10/10.1063/1.1829378
http://aip.metastore.ingenta.com/content/aip/journal/jap/97/10/10.1063/1.1829378
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## Figures

FIG. 1.

Geometry and coordinate axes for the bimorph cantilever: is the sample length, its width, while and are the thicknesses of the two layers. The origin of the coordinate axes is assumed to the interface.

FIG. 2.

Dependence of the ratio on Poisson’s ratio of the substrate, , for the case of the system considered in Ref. 35 (a), and for the one considered in Ref. 19 (b).

FIG. 3.

Dependence of the ratio on Poisson’s ratio of the substrate, , for different film thickness : (a) , (b) , and (c) , in the case of , , , and values considered in Ref. 35.

FIG. 4.

Dependence of the ratio on Poisson’s ratio of the substrate, , for different film thickness : (a) , (b) , and (c) , in the case of , , , and values considered in Ref. 19.

FIG. 5.

Dependence of the neutral planes position (straight) and (dashed) on the components thickness ratio for constant. The used values of Young’s moduli , , and Poisson’s ratios , of the components and , respectively, are: , , , (see Ref. 35) (a); , , , (see Ref. 19) (b); , , , (c) and , , , (d).

FIG. 6.

Dependence of the neutral planes position (straight) and (dashed) on the component thickness for a fixed total thickness of the cantilever . Young’s moduli , and Poisson’s ratios , of the components and , respectively, are: , , , (see Ref. 35) (a); , , , (see Ref. 19) (b); , , , (c); and , , , (d).

FIG. 7.

Comparison between the deflection in absolute value, , behavior as deduced from Ref. 30 (dashed) and as obtained from Eq. (27) (straight) versus the components thickness ratio for constant. The , , , , , , and values are those of Ref. 29.

/content/aip/journal/jap/97/10/10.1063/1.1829378
2005-05-16
2014-04-24

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