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Rear surface spallation on single-crystal silicon in nanosecond laser micromachining
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10.1063/1.1896095
/content/aip/journal/jap/97/10/10.1063/1.1896095
http://aip.metastore.ingenta.com/content/aip/journal/jap/97/10/10.1063/1.1896095
/content/aip/journal/jap/97/10/10.1063/1.1896095
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/content/aip/journal/jap/97/10/10.1063/1.1896095
2005-05-02
2014-11-28
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Rear surface spallation on single-crystal silicon in nanosecond laser micromachining
http://aip.metastore.ingenta.com/content/aip/journal/jap/97/10/10.1063/1.1896095
10.1063/1.1896095
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