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Effect of dielectric materials on stress-induced damage modes in damascene Cu lines
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10.1063/1.1909283
/content/aip/journal/jap/97/10/10.1063/1.1909283
http://aip.metastore.ingenta.com/content/aip/journal/jap/97/10/10.1063/1.1909283

Figures

Image of FIG. 1.
FIG. 1.

(a) Model geometry for the two-level via-line structures used for the finite element analysis.

Image of FIG. 2.
FIG. 2.

Linewidth dependence of stress in damascene Cu lines integrated with (a) and (b) low- dielectric.

Image of FIG. 3.
FIG. 3.

Linewidth and spacing dependence of stress in narrow lines integrated with (a) and (b) the low- dielectric. The solid and open points indicate the stresses of the lines with pitches of 0.38 and , respectively.

Image of FIG. 4.
FIG. 4.

(a) Hydrostatic stress and (b) von Mises stress of damascene Cu lines integrated with (rectangle) and the low- dielectric (circle).

Image of FIG. 5.
FIG. 5.

The volume-averaged individual stress component for the via-line structures with and the low- dielectric of , via, and : (a) , (b) , and (c) .

Image of FIG. 6.
FIG. 6.

The volume-averaged individual stress components for the via-line structures with and the low- dielectric of , via, and : (a) hydrostatic stress and (b) von Mises stress.

Image of FIG. 7.
FIG. 7.

Cu via embedded in dielectric materials; to simplify the calculations, it is assumed that the via is isolated, and thus not connected to the lines in either the upper or lower levels.

Image of FIG. 8.
FIG. 8.

The yield strength as a function of the elastic modulus of the dielectric material for different via widths.

Tables

Generic image for table
Table I.

Termomechanical properties of the materials used in the finite element calculations.

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/content/aip/journal/jap/97/10/10.1063/1.1909283
2005-05-11
2014-04-23
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Effect of dielectric materials on stress-induced damage modes in damascene Cu lines
http://aip.metastore.ingenta.com/content/aip/journal/jap/97/10/10.1063/1.1909283
10.1063/1.1909283
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