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Effect of ozone treatment on the electrical properties of thin films
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View: Figures


Image of FIG. 1.
FIG. 1.

Scanning electron microscopy (SEM) picture of the films deposited on Pt wafers showing a columnar structure.

Image of FIG. 2.
FIG. 2.

(a) Dielectric constant vs frequency of the different films. Films annealed in ozone show a slight increase in the dielectric constant. (b) The loss tangents vs frequency of the different films. It was noticed that films which were postannealed in ozone showed a lowering of the loss tangents and its lowest for films postannealed in ozone at .

Image of FIG. 3.
FIG. 3.

Dielectric constant vs voltage for only the films postannealed in ozone at is shown in comparison with films without top electrode annealing and films with top electrode annealing in oxygen. Note the slight shift in the curve for films without the top electrode anneal.

Image of FIG. 4.
FIG. 4.

Leakage measurements of the different films at . The leakage is found to decrease after ozone postannealing until , however, beyond that it increases again.

Image of FIG. 5.
FIG. 5.

vs plots of the different films. The plots are linear for the ozone annealed films.

Image of FIG. 6.
FIG. 6.

vs plots of the different films from which the barrier heights were extracted.

Image of FIG. 7.
FIG. 7.

A plot of the different barrier heights vs the ozone postannealing temperature. The barrier height is highest for the films postannealed in ozone at which might be a cause for its low leakage current.

Image of FIG. 8.
FIG. 8.

Defect distribution of oxygen vacancies , electrons , and holes of a Pt/BST/Pt structure at equilibrated at at (a) and (b) . The formation of junctions reduces the conductivity of the film exposed to the higher oxygen activity.

Image of FIG. 9.
FIG. 9.

Calculated small signal resistivity of a -thick BST thin film at as a function of the postannealing under different oxygen partial pressures at .


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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Effect of ozone treatment on the electrical properties of (Ba0.7Sr0.3)TiO3 thin films