Thermal desorption spectra for a ultrathin film grown on Si substrate.
Theoretical simulation results for a ultrathin film with a thickness of . The x-ray reflectivity from (a) smooth Si substrate , (b) film and smooth Si substrate , (c) film and smooth Si substrate , and (d) film with a surface roughness and smooth Si substrate .
Comparison of experiment and simulation results for a ultrathin film on Si substrate.
Fitting results for a nominal film by three repeating measurements.
Fitting results for nominal 2-, 4-, 6-, 8-, and ultrathin films.
The physical structures of the nominal ultrathin films repeatedly measured three times. The values in parentheses are calculated from the minima of GIXRR.
The physical structures of ultrathin films with nominal thicknesses of 2, 4, 6, 8, and . The values in parentheses are calculated from the minima of GIXRR.
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