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Comprehensive study of the resistivity of copper wires with lateral dimensions of 100 nm and smaller
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10.1063/1.1834982
/content/aip/journal/jap/97/2/10.1063/1.1834982
http://aip.metastore.ingenta.com/content/aip/journal/jap/97/2/10.1063/1.1834982
/content/aip/journal/jap/97/2/10.1063/1.1834982
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/content/aip/journal/jap/97/2/10.1063/1.1834982
2004-12-27
2014-07-13
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Comprehensive study of the resistivity of copper wires with lateral dimensions of 100 nm and smaller
http://aip.metastore.ingenta.com/content/aip/journal/jap/97/2/10.1063/1.1834982
10.1063/1.1834982
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