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Specular spectroscopic ellipsometry for the critical dimension monitoring of gratings fabricated on a thick transparent plate
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10.1063/1.1854728
/content/aip/journal/jap/97/5/10.1063/1.1854728
http://aip.metastore.ingenta.com/content/aip/journal/jap/97/5/10.1063/1.1854728

Figures

Image of FIG. 1.
FIG. 1.

Lamellar grating patterned on a transparent quartz plate.

Image of FIG. 2.
FIG. 2.

Description of the liquid solution method.

Image of FIG. 3.
FIG. 3.

Description of the incoherent backreflection method for gratings.

Image of FIG. 4.
FIG. 4.

Depiction of the diminution effect due to the deflection of backreflected contributions.

Image of FIG. 5.
FIG. 5.

Diminution function of the ellipsometer. The circles mark the direct measurement of the intensity in the detector while deflecting a beam. The curve is an analytical approximation.

Image of FIG. 6.
FIG. 6.

Comparison of both methods on sample D at 70° of incidence. The circles mark measurement, while the curves correspond to modeling.

Image of FIG. 7.
FIG. 7.

Comparison of both methods on sample A at 70° of incidence. The circles mark measurement, while the curves correspond to modeling.

Image of FIG. 8.
FIG. 8.

Comparison of both methods on sample A at 32° of incidence. The circles mark measurement, while the curves correspond to modeling.

Tables

Generic image for table
Table I.

Fitted grating parameters.

Generic image for table
Table II.

Comparison of the errors of both methods.

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/content/aip/journal/jap/97/5/10.1063/1.1854728
2005-02-16
2014-04-21
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Specular spectroscopic ellipsometry for the critical dimension monitoring of gratings fabricated on a thick transparent plate
http://aip.metastore.ingenta.com/content/aip/journal/jap/97/5/10.1063/1.1854728
10.1063/1.1854728
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