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Spectroscopic analysis of -C and films prepared by ultrafast high repetition rate pulsed laser deposition
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10.1063/1.1874300
/content/aip/journal/jap/97/7/10.1063/1.1874300
http://aip.metastore.ingenta.com/content/aip/journal/jap/97/7/10.1063/1.1874300

Figures

Image of FIG. 1.
FIG. 1.

Nitrogen concentration revealed by XPS as a function of nitrogen pressure.

Image of FIG. 2.
FIG. 2.

Deconvolution of the C and N spectra of films at different nitrogen concentrations.

Image of FIG. 3.
FIG. 3.

Deconvolution of the C envelopes of -C films at two different laser fluences.

Image of FIG. 4.
FIG. 4.

Curve fitting results of the C spectra plotted as a function of laser fluence.

Image of FIG. 5.
FIG. 5.

Raman spectra at 514-nm excitation of films prepared at different nitrogen contents.

Image of FIG. 6.
FIG. 6.

ratios at 514- and 633-nm excitation wavelengths as a function of nitrogen content.

Image of FIG. 7.
FIG. 7.

FWHM of the peak as a function of nitrogen.

Image of FIG. 8.
FIG. 8.

peak position as a function of nitrogen content.

Image of FIG. 9.
FIG. 9.

The Raman spectra of films prepared at various laser fluences.

Image of FIG. 10.
FIG. 10.

ratio of films prepared at various laser fluences.

Image of FIG. 11.
FIG. 11.

FWHM of peak as a function of laser fluence.

Image of FIG. 12.
FIG. 12.

FTIR absorption spectra of films with different nitrogen concentrations.

Image of FIG. 13.
FIG. 13.

SEM images of samples prepared at (a) and (b) at .

Image of FIG. 14.
FIG. 14.

Hardness and elastic modulus values as a function of indentation depth for films containing various nitrogen contents.

Tables

Generic image for table
Table I.

PLD parameters used for the synthesis of -C and films.

Generic image for table
Table II.

The C bonding areas and peak widths of films.

Generic image for table
Table III.

The N bonding areas and peak widths of films.

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/content/aip/journal/jap/97/7/10.1063/1.1874300
2005-03-28
2014-04-18
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Spectroscopic analysis of a-C and a-CNx films prepared by ultrafast high repetition rate pulsed laser deposition
http://aip.metastore.ingenta.com/content/aip/journal/jap/97/7/10.1063/1.1874300
10.1063/1.1874300
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