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Characterization of a radio frequency carbon nanotube growth plasma by ultraviolet absorption and optical emission spectroscopy
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10.1063/1.1865315
/content/aip/journal/jap/97/8/10.1063/1.1865315
http://aip.metastore.ingenta.com/content/aip/journal/jap/97/8/10.1063/1.1865315

Figures

Image of FIG. 1.
FIG. 1.

Estimated rotational temperature vs (a) pressure, (b) lower electrode power, and (c) top coil power. Also shown is the result of a simple global model fit (dashed line).

Image of FIG. 2.
FIG. 2.

Sample UV absorption data showing the absorption peak at . The absorption intensity is estimated at the center peak of the absorbance, as shown on the plot.

Image of FIG. 3.
FIG. 3.

Methyl concentration measured for different operating conditions in the reactor. The standard condition is , , , top coil power, bottom electrode power, and bottom electrode temperature. (a) The bottom electrode power varied between 20 and . Shown are the densities measured without heating, heating without a substrate present, and heating with a substrate present. (b) The top Coil power is between 0 and . (c) The pressure varied between 0.5 and . The mole fraction is also indicated on this plot.

Image of FIG. 4.
FIG. 4.

Ratio of intensities predicted by the model fit to observed intensities. The and lines and Ar line all fit well, while the 750, 751, 801, 811, and lines differ by varying amounts. The line also shows significant variation, but is subject to substantial error due to its low intensity.

Image of FIG. 5.
FIG. 5.

Predicted electron densities (at ), electron temperature, and atomic to molecular hydrogen ratio from the emission model as a function of the bottom (capacitive) power, top (coil) power, and pressure.

Image of FIG. 6.
FIG. 6.

Bar chart showing the relative impact of different processes involved in the emission model. The data shown represent the average contribution while the error bars show the range (min/max) for the contributions. (a) Relative excitation contributions including direct and dissociative excitation and cascade populations by both direct and readsorbed radiation. (b) Relative rates of loss processes of radiative decay (including reabsorbed radiation) and collisional quenching. The impact of reabsorption by itself is also presented as a percentage of the total loss rate.

Tables

Generic image for table
Table I.

Rate parameters used to model results.

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/content/aip/journal/jap/97/8/10.1063/1.1865315
2005-04-07
2014-04-17
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Characterization of a radio frequency carbon nanotube growth plasma by ultraviolet absorption and optical emission spectroscopy
http://aip.metastore.ingenta.com/content/aip/journal/jap/97/8/10.1063/1.1865315
10.1063/1.1865315
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