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Quantitative determination of tensile stress creation during island coalescence using selective-area growth
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View: Figures


Image of FIG. 1.
FIG. 1.

(a) Schematic of an idealized cylindrical structure, (b) ion channeling focused ion beam (ICFIB) cross-section image of actual structure prior to coalescence, and (c) ICFIB image of the actual structure after coalescence. Note, the islands were coated after electrodeposition with Pt for processing in the FIB.

Image of FIG. 2.
FIG. 2.

Stress-thickness vs time plot for a radius coalescence sample showing a measured change in during coalescence of .

Image of FIG. 3.
FIG. 3.

Idealized cross-sectional geometry used in current evolution model, (a) prior to coalescence, (b) postcoalescence.

Image of FIG. 4.
FIG. 4.

Overlay of current predicted from geometric model (dashed line) with the current measured during deposition (solid line).

Image of FIG. 5.
FIG. 5.

RMS roughness surface roughness of planar films measured using ex situ AFM. The % RMS roughness decreased significantly and stabilized at of thickness.

Image of FIG. 6.
FIG. 6.

Plot of measured, FC, and FE calculated island coalescence stress as a function of radius. Both models assume perfect cylinders coalescing and therefore should overestimate the coalescence stress.

Image of FIG. 7.
FIG. 7.

In-plane stress fields in the full structure as calculated from FE model. Darker color indicates stronger tensile stress.


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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Quantitative determination of tensile stress creation during island coalescence using selective-area growth