(a) Schematic of an idealized cylindrical structure, (b) ion channeling focused ion beam (ICFIB) cross-section image of actual structure prior to coalescence, and (c) ICFIB image of the actual structure after coalescence. Note, the islands were coated after electrodeposition with Pt for processing in the FIB.
Stress-thickness vs time plot for a radius coalescence sample showing a measured change in during coalescence of .
Idealized cross-sectional geometry used in current evolution model, (a) prior to coalescence, (b) postcoalescence.
Overlay of current predicted from geometric model (dashed line) with the current measured during deposition (solid line).
RMS roughness surface roughness of planar films measured using ex situ AFM. The % RMS roughness decreased significantly and stabilized at of thickness.
Plot of measured, FC, and FE calculated island coalescence stress as a function of radius. Both models assume perfect cylinders coalescing and therefore should overestimate the coalescence stress.
In-plane stress fields in the full structure as calculated from FE model. Darker color indicates stronger tensile stress.
Article metrics loading...
Full text loading...