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Ion-induced surface activation, chemical sputtering, and hydrogen release during plasma-assisted hydrocarbon film growth
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10.1063/1.1883729
/content/aip/journal/jap/97/9/10.1063/1.1883729
http://aip.metastore.ingenta.com/content/aip/journal/jap/97/9/10.1063/1.1883729
/content/aip/journal/jap/97/9/10.1063/1.1883729
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/content/aip/journal/jap/97/9/10.1063/1.1883729
2005-04-19
2014-07-22
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Ion-induced surface activation, chemical sputtering, and hydrogen release during plasma-assisted hydrocarbon film growth
http://aip.metastore.ingenta.com/content/aip/journal/jap/97/9/10.1063/1.1883729
10.1063/1.1883729
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