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Mechanics of hydrogenated amorphous carbon deposits from electron-beam-induced deposition of a paraffin precursor
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View: Figures


Image of FIG. 1.
FIG. 1.

A general view of the EBID process: primary electron (PE) and secondary electron (SE), precursor molecules adsorbed , reevaporated , migrated , fragmented , and polymerized .

Image of FIG. 2.
FIG. 2.

(a) AFM image of a rectangular-shaped EBID deposition. The paraffin source is away (lower right, not on image). (b) Cross sections and of the EBID deposit.

Image of FIG. 3.
FIG. 3.

(a) SEM images of five EBID-deposited posts in each array , and , located 10, 15, and from the paraffin source, respectively. The SEM images were acquired at 30° tilt. The deposition time from left to right was 2, 4, 6, 8, and 10 min, respectively. (b) Posts height vs deposition time and its linear fit.

Image of FIG. 4.
FIG. 4.

SEM images of the EBID deposit size vs the exposure size (square area): (a) an exposure area of and (b) an exposure area of .

Image of FIG. 5.
FIG. 5.

SEM image of three posts fabricated with SEM “spot mode.” The SEM image was acquired at 30° tilt. The EBID deposition time was 45 s for all three posts and the paraffin source is located from each post.

Image of FIG. 6.
FIG. 6.

(a) Bright-field TEM image of a freely suspended EBID structure. (b) EELS spectra of an EBID film deposited at 3-kV accelerating voltage on top of a 50-nm-thick support film and of graphite (HOPG) used as a reference.

Image of FIG. 7.
FIG. 7.

A typical Raman spectrum of an EBID film (The dashed lines are the single fitted Gaussian–Lorentzian peaks).

Image of FIG. 8.
FIG. 8.

SIMS elemental maps of the rectangular EBID film (nominally) from . The respective maps are (a) carbon and (b) deuterium.

Image of FIG. 9.
FIG. 9.

(a) AFM image of the tested EBID sample before nanoindentation tests. (b) A line scan of the sample.

Image of FIG. 10.
FIG. 10.

(a) Representative load-displacement curves of indentations made at peak indentation load for EBID films made at 3-, 12-, and 20-kV accelerating voltages, respectively. (b) The hardness and elastic modulus results.

Image of FIG. 11.
FIG. 11.

(a) AFM image and (b) a line scan of the residual indentation impression made at a peak indentation load of .

Image of FIG. 12.
FIG. 12.

SEM image of a carbonized PAN fiber clamped to an AFM cantilever tip with EBID method: (a) side view and (b) top view at 30° tilt.


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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Mechanics of hydrogenated amorphous carbon deposits from electron-beam-induced deposition of a paraffin precursor