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Hydrogen softening and optical transparency in Si-incorporated hydrogenated amorphous carbon films
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10.1063/1.2132088
/content/aip/journal/jap/98/10/10.1063/1.2132088
http://aip.metastore.ingenta.com/content/aip/journal/jap/98/10/10.1063/1.2132088

Figures

Image of FIG. 1.
FIG. 1.

(a) Deconvolution of C XPS core-level spectra and (b) total bonding fraction ratio of films as a function of Si concentration.

Image of FIG. 2.
FIG. 2.

(a) Normalized and background subtracted visible-Raman spectra and (b) fitting parameters [intensity ratio and G peak position] of films as a function of Si content.

Image of FIG. 3.
FIG. 3.

Raman background slope vs ratio (determined using heavy-ion ERD analysis) of samples.

Image of FIG. 4.
FIG. 4.

UV Raman spectra of films with different silicon concentrations. The spectra are shifted to each other for ease of comparison.

Image of FIG. 5.
FIG. 5.

(a) Optical-absorption edge vs photon energy as a function of Si content. (b1) The effect of Si incorporation on the optical band gap and (b2) Raman ratio of a series of films.

Image of FIG. 6.
FIG. 6.

The effect of Si incorporation on (a) Young’s modulus and hardness of films. The inset illustrates the reduction of residual stress of the PECVD films as a result of the TMS-incorporation process. (b) The evolution of and concentrations vs TMS∕ flow-rate ratio.

Image of FIG. 7.
FIG. 7.

X-ray reflectivity curves of samples with constant deposition time as a function of Si concentration. The right inset illustrates the deposition rate as a function of TMS∕ ratio. The left inset shows a close-up figure illustrating the development of a double critical angle in the spectrum of the sample ( Si).

Image of FIG. 8.
FIG. 8.

The effect of Si addition on (a) the electron-density values, and (b) the refractive index, measured at , of films.

Tables

Generic image for table
Table I.

The effect of silicon atomic concentrations on the binding energy and full width at half maximum (FWHM) of C , , and data are obtained from the peak fitting on C binding energy.

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/content/aip/journal/jap/98/10/10.1063/1.2132088
2005-11-17
2014-04-21
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Hydrogen softening and optical transparency in Si-incorporated hydrogenated amorphous carbon films
http://aip.metastore.ingenta.com/content/aip/journal/jap/98/10/10.1063/1.2132088
10.1063/1.2132088
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