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Growth of ZnO thin films by ultraviolet pulsed-laser ablation: Study of plume dynamics
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10.1063/1.2149498
/content/aip/journal/jap/98/12/10.1063/1.2149498
http://aip.metastore.ingenta.com/content/aip/journal/jap/98/12/10.1063/1.2149498

Figures

Image of FIG. 1.
FIG. 1.

AFM images of ZnO films grown by nanosecond PLD on Si (100) at and (a) , (b) , and (c) .

Image of FIG. 2.
FIG. 2.

Dependence of grain size of ZnO films, fabricated by nanosecond PLD on fused silica, on substrate temperature and oxygen pressure.

Image of FIG. 3.
FIG. 3.

Dependence of FWHM of (002) rocking curve of ZnO films, fabricated by nanosecond PLD on fused silica, on substrate temperature and oxygen pressure.

Image of FIG. 4.
FIG. 4.

AFM images of ZnO films grown by femtosecond PLD on Si (100) at and (a) , (b) , and (c) .

Image of FIG. 5.
FIG. 5.

Emission spectrum following nanosecond laser ablation of a ZnO target (, , ) measured in vacuum at from the target along the surface normal. Emission wavelengths from standard atomic emission tables: : 303.58, 307.21, 328.23, (330.26, 330.29), (334.50, 334.56, 334.60), 462.98, 468.01, 472.22, 481.05, 518.20, 636.23 nm. : 491.16, 492.40, 589.43, 602.12, 610.25 nm.

Image of FIG. 6.
FIG. 6.

Time-resolved emission spectra from arising during the nanosecond laser ablation of ZnO in vacuum , monitored at and along the surface normal.

Image of FIG. 7.
FIG. 7.

Time profiles of the emission intensity from at different viewing distances, , from the ZnO target surface along the normal following nanosecond laser ablation.

Image of FIG. 8.
FIG. 8.

Measurement of the expansion velocity of in the plume accompanying nanosecond laser ablation of ZnO target .

Image of FIG. 9.
FIG. 9.

Time-resolved emission spectra of and arising during the femtosecond laser ablation of ZnO in vacuum , monitored at along the surface normal.

Image of FIG. 10.
FIG. 10.

Time profiles of the emission intensity from and at different viewing distances from the ZnO target surface along the normal, following femtosecond laser ablation.

Image of FIG. 11.
FIG. 11.

Measurement of the expansion velocity of and in the plume accompanying femtosecond laser ablation of ZnO target .

Tables

Generic image for table
Table I.

Laser parameters employed for PLD growth of ZnO films.

Generic image for table
Table II.

Comparison of the properties of ZnO films fabricated on Si (100) by nanosecond and femtosecond PLD at .

Generic image for table
Table III.

Mean propagation velocities along the surface normal and the corresponding kinetic energy of the species formed during nanosecond and femtosecond laser ablations of ZnO at in vacuum.

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/content/aip/journal/jap/98/12/10.1063/1.2149498
2005-12-22
2014-04-23
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Growth of ZnO thin films by ultraviolet pulsed-laser ablation: Study of plume dynamics
http://aip.metastore.ingenta.com/content/aip/journal/jap/98/12/10.1063/1.2149498
10.1063/1.2149498
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