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Study of the sputtered Cu atoms and ions in a hollow cathode glow discharge using a hybrid model
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10.1063/1.2005381
/content/aip/journal/jap/98/3/10.1063/1.2005381
http://aip.metastore.ingenta.com/content/aip/journal/jap/98/3/10.1063/1.2005381
View: Figures

Figures

Image of FIG. 1.
FIG. 1.

Calculated flux energy distribution of the ions, , and ions bombarding the cathode surface at and .

Image of FIG. 2.
FIG. 2.

Calculated ejected , back diffusion , and net sputtered Cu-atom axial (a) and radial (b) fluxes at the cathode bottom and sidewalls, respectively, at and .

Image of FIG. 3.
FIG. 3.

Calculated depth profile at the cathode sidewalls after sputtering for (a), compared to the electric-field distribution at the sidewalls (b), at and at four currents.

Image of FIG. 4.
FIG. 4.

Calculated net sputtered Cu-atom flux, integrated over the complete cathode surface, as a function of electrical current and at four different pressures.

Image of FIG. 5.
FIG. 5.

Calculated two-dimensional density profiles of the nonthermalized (a) and thermalized (b) Cu atoms at and .

Image of FIG. 6.
FIG. 6.

Calculated two-dimensional profiles of the Cu-atom density at and four different currents: 9 (a), 6 (b), 2 (c) and (d).

Image of FIG. 7.
FIG. 7.

Calculated two-dimensional profiles of the Cu-atom density at and four different pressures: 0.3 (a), 0.53 (b), 0.76 (c), and (d).

Image of FIG. 8.
FIG. 8.

Calculated two-dimensional collision rates of Cu atoms due to electron-impact ionization (a), Penning ionization (b), ion ACT collision (c), and total Cu ionization rate (d) at a pressure of and a current of .

Image of FIG. 9.
FIG. 9.

Calculated two-dimensional profiles of the ion density at and four different currents: 9 (a), 6 (b), 2 (c), and (d).

Image of FIG. 10.
FIG. 10.

Calculated two-dimensional profiles of the ion density at and four different pressures: 0.3 (a), 0.53 (b), 0.76 (c), and (d).

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/content/aip/journal/jap/98/3/10.1063/1.2005381
2005-08-10
2014-04-18
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Study of the sputtered Cu atoms and Cu+ ions in a hollow cathode glow discharge using a hybrid model
http://aip.metastore.ingenta.com/content/aip/journal/jap/98/3/10.1063/1.2005381
10.1063/1.2005381
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