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Fundamentals of micromechanical thermoelectric sensors
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Image of FIG. 1.
FIG. 1.

(Color online) Schematic of the heater strip.

Image of FIG. 2.
FIG. 2.

(Color online) (a) Frequency response of the heater temperature: heater; heater. (b) Heater temperature modulation in response to a modulation of the air gap for a static heater excitation : heater; heater.

Image of FIG. 3.
FIG. 3.

(Color online) (a) Frequency response for the heater temperature for a short heater and different leg lengths. (b) Heater temperature modulation in response to a modulation of the air gap for a short heater and different leg lengths.

Image of FIG. 4.
FIG. 4.

(Color online) Resistivity vs temperature for an -doped Si resistor with a dopant concentration of . The temperature dependence is quasilinear over a large temperature range with a temperature coefficient . The temperature at the resistivity maximum is .

Image of FIG. 5.
FIG. 5.

(Color online) Blue curve: Static I/V curve for a n-doped heater with a room-temperature resistance and a power sensitivity . The maximum of the resistivity occurs at and coincides with the knee in the I/V curve. The plateau current for the idealized model, , coincides with the inflection point in the positive differential conduction regime of the I/V curve. Green curve: Heater temperature corresponding to the I/V curve.

Image of FIG. 6.
FIG. 6.

(Color online) Schematic diagram of the electrothermal feedback mechanism.


Generic image for table
Table I.

Electrical and thermal properties of Si resistors for different levels of and doping: doping concentration, room-temperature resistivity, maximum resistivity normalized to the room-temperature resistivity, temperature at the resistivity maximum, sensitivity parameter (see also Fig. 4).


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Scitation: Fundamentals of micromechanical thermoelectric sensors