(Color online) Schematic of the heater strip.
(Color online) (a) Frequency response of the heater temperature: heater; heater. (b) Heater temperature modulation in response to a modulation of the air gap for a static heater excitation : heater; heater.
(Color online) (a) Frequency response for the heater temperature for a short heater and different leg lengths. (b) Heater temperature modulation in response to a modulation of the air gap for a short heater and different leg lengths.
(Color online) Resistivity vs temperature for an -doped Si resistor with a dopant concentration of . The temperature dependence is quasilinear over a large temperature range with a temperature coefficient . The temperature at the resistivity maximum is .
(Color online) Blue curve: Static I/V curve for a n-doped heater with a room-temperature resistance and a power sensitivity . The maximum of the resistivity occurs at and coincides with the knee in the I/V curve. The plateau current for the idealized model, , coincides with the inflection point in the positive differential conduction regime of the I/V curve. Green curve: Heater temperature corresponding to the I/V curve.
(Color online) Schematic diagram of the electrothermal feedback mechanism.
Electrical and thermal properties of Si resistors for different levels of and doping: doping concentration, room-temperature resistivity, maximum resistivity normalized to the room-temperature resistivity, temperature at the resistivity maximum, sensitivity parameter (see also Fig. 4).
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