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Effects of deposition temperature on the mechanical and physical properties of silicon nitride thin films
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10.1063/1.2006972
/content/aip/journal/jap/98/4/10.1063/1.2006972
http://aip.metastore.ingenta.com/content/aip/journal/jap/98/4/10.1063/1.2006972
/content/aip/journal/jap/98/4/10.1063/1.2006972
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/content/aip/journal/jap/98/4/10.1063/1.2006972
2005-08-16
2014-10-26
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Effects of deposition temperature on the mechanical and physical properties of silicon nitride thin films
http://aip.metastore.ingenta.com/content/aip/journal/jap/98/4/10.1063/1.2006972
10.1063/1.2006972
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