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Surface morphological evolution of epitaxial CrN(001) layers
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10.1063/1.2035307
/content/aip/journal/jap/98/5/10.1063/1.2035307
http://aip.metastore.ingenta.com/content/aip/journal/jap/98/5/10.1063/1.2035307
View: Figures

Figures

Image of FIG. 1.
FIG. 1.

Atomic force micrographs from layers deposited at 600 °C from an oblique angle with thicknesses of (a) 57 nm and (b) 230 nm.

Image of FIG. 2.
FIG. 2.

(a) [100]-zone-axis cross-sectional transmission electron micrograph with (b) a corresponding selected-area electron-diffraction pattern and (c) a higher magnification micrograph of the area outlined in (a), from a 500-nm-thick layer grown at 600 °C from an oblique deposition angle .

Image of FIG. 3.
FIG. 3.

Atomic force micrographs from layers deposited at 700 °C from an oblique angle with thicknesses of (a) 57 nm and (b) 230 nm.

Image of FIG. 4.
FIG. 4.

(a) Cross-sectional transmission electron micrograph near the [100]-zone axis with (b) a corresponding selected-area electron-diffraction pattern and (c) a higher magnification micrograph showing an inverted pyramid, from a 57-nm-thick layer grown at 700 °C with an oblique deposition angle .

Image of FIG. 5.
FIG. 5.

Atomic force micrographs from layers deposited at 800 °C from an oblique angle with thicknesses of (a) 57 nm and (b) 230 nm.

Image of FIG. 6.
FIG. 6.

Cross-sectional transmission electron micrograph near the [100]-zone axis from a 57-nm-thick layer grown at 800 °C with an oblique deposition angle .

Image of FIG. 7.
FIG. 7.

Plot of the measured rms-surface roughness as a function of growth temperature for layer thicknesses and 230 nm. The open symbols represent the selected-area roughness values , obtained from the relatively smooth surfaces that surround protrusions related to misoriented grains and supermounds for and 700 °C, respectively.

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/content/aip/journal/jap/98/5/10.1063/1.2035307
2005-09-09
2014-04-19
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Surface morphological evolution of epitaxial CrN(001) layers
http://aip.metastore.ingenta.com/content/aip/journal/jap/98/5/10.1063/1.2035307
10.1063/1.2035307
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