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Study of organic polymer thin-film etching by plasma beam irradiation
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10.1063/1.2113410
/content/aip/journal/jap/98/8/10.1063/1.2113410
http://aip.metastore.ingenta.com/content/aip/journal/jap/98/8/10.1063/1.2113410
/content/aip/journal/jap/98/8/10.1063/1.2113410
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/content/aip/journal/jap/98/8/10.1063/1.2113410
2005-10-24
2014-08-21
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Study of organic polymer thin-film etching by plasma beam irradiation
http://aip.metastore.ingenta.com/content/aip/journal/jap/98/8/10.1063/1.2113410
10.1063/1.2113410
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