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Study of organic polymer thin-film etching by plasma beam irradiation
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10.1063/1.2113410
/content/aip/journal/jap/98/8/10.1063/1.2113410
http://aip.metastore.ingenta.com/content/aip/journal/jap/98/8/10.1063/1.2113410
View: Figures

Figures

Image of FIG. 1.
FIG. 1.

Molecular formula of the samples. PtBuMA, PCHMA, and PBMA can be expressed also as ; is , , and , respectively.

Image of FIG. 2.
FIG. 2.

Schematic diagram of plasma beam irradiation apparatus.

Image of FIG. 3.
FIG. 3.

Ion energy dependence of EY with plasma beam irradiation.

Image of FIG. 4.
FIG. 4.

Ion energy dependence of EY with Ar plasma beam irradiation.

Image of FIG. 5.
FIG. 5.

Ion energy dependence of EY with plasma beam irradiation.

Image of FIG. 6.
FIG. 6.

The relation between the factor and EY.

Image of FIG. 7.
FIG. 7.

(a) The survey spectra and (b) spectra of PtBuMA before and after Ar plasma irradiation.

Image of FIG. 8.
FIG. 8.

The survey spectra of PtBuMA irradiated by hydrogen radicals and plasma.

Image of FIG. 9.
FIG. 9.

The survey spectra of PtBuMA, PCHMA, and PBMA polymer before and after irradiation of the plasma beam at the ion energy of 130 and .

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/content/aip/journal/jap/98/8/10.1063/1.2113410
2005-10-24
2014-04-21
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Study of organic polymer thin-film etching by plasma beam irradiation
http://aip.metastore.ingenta.com/content/aip/journal/jap/98/8/10.1063/1.2113410
10.1063/1.2113410
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