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SEM image of the (001) oriented photonic crystal grown on the template. Inset: An enlarged SEM image of the template with a pillar spacing of ; the scale bar in the inset is .
Reflection spectra of (001) oriented crystals at normal incidence. (a) and (b) are the measurement and simulation results of (001) oriented crystals with different numbers of layers of spheres on a template with a pillar spacing of . (c) The measurement results of (001) oriented crystals grown on templates with different lattice constants. The crystals in (c) are composed of 23 layers of spheres (i.e., total thickness for pillar spacing is ; however, as the pillar spacing increases, the thickness decreases).
(a) The band structure of an inverted tetragonal photonic crystal formed from air spheres in silicon calculated by plane-wave expansion method, where the tetragonal distortion is 0.915, and the frequency is normalized with the ratio of the velocity of light in vacuum to the in-plane lattice constant. (b) Dependence of the upper and lower band-gap edge positions on the ratio of the inverted tetragonal photonic crystal with air spheres in silicon.
Comparison between the experiment and simulation.
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