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Characterization of surfaces after ion implantation and annealing using positron annihilation spectroscopy and atomic force microscopy
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10.1063/1.2161940
/content/aip/journal/jap/99/2/10.1063/1.2161940
http://aip.metastore.ingenta.com/content/aip/journal/jap/99/2/10.1063/1.2161940
/content/aip/journal/jap/99/2/10.1063/1.2161940
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/content/aip/journal/jap/99/2/10.1063/1.2161940
2006-01-27
2014-11-23
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Characterization of 6H-SiC surfaces after ion implantation and annealing using positron annihilation spectroscopy and atomic force microscopy
http://aip.metastore.ingenta.com/content/aip/journal/jap/99/2/10.1063/1.2161940
10.1063/1.2161940
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