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Near edge x-ray absorption fine structure study of aligned -bonded carbon structures in nitrogenated ta-C films
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10.1063/1.2173046
/content/aip/journal/jap/99/4/10.1063/1.2173046
http://aip.metastore.ingenta.com/content/aip/journal/jap/99/4/10.1063/1.2173046
View: Figures

Figures

Image of FIG. 1.
FIG. 1.

Intensity ratio of peak at C edge with nitrogen concentration. Inset: Variation of C -edge spectrum with nitrogen concentration.

Image of FIG. 2.
FIG. 2.

(a) Variation of N K edge spectrum with nitrogen concentration in the films. (b) Intensity ratio of peak at N edge with nitrogen concentration. (c) Variation of film hardness with nitrogen concentration.

Image of FIG. 3.
FIG. 3.

Angular dependence of the C edge of a ta-CN film containing 12.5 at. % N.

Image of FIG. 4.
FIG. 4.

Deconvoluted C peaks for angles (a) 10, (b) 55, and (c) 90 deg, respectively, of a ta-CN film containing 12.5 at. % N. On the left compartment the solid line represents the resulting difference curve and the dotted line the fitted ionization step function.

Image of FIG. 5.
FIG. 5.

Variation of C edge spectra of a ta-CN film containing 12.5 at. % N with annealing temperature. Inset: peak intensity as a function of temperature.

Image of FIG. 6.
FIG. 6.

(a) Variation of N edge spectra of a ta-CN film containing 12.5 at. % N with annealing temperature. (b) Variation of relative intensity ratios of peak at N edge with annealing temperature.

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/content/aip/journal/jap/99/4/10.1063/1.2173046
2006-02-22
2014-04-18
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Near edge x-ray absorption fine structure study of aligned π-bonded carbon structures in nitrogenated ta-C films
http://aip.metastore.ingenta.com/content/aip/journal/jap/99/4/10.1063/1.2173046
10.1063/1.2173046
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