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Structural and mechanical properties of TaZrN films: Experimental and ab initio studies
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10.1063/1.2178394
/content/aip/journal/jap/99/5/10.1063/1.2178394
http://aip.metastore.ingenta.com/content/aip/journal/jap/99/5/10.1063/1.2178394

Figures

Image of FIG. 1.
FIG. 1.

Experimental lattice parameter as a function of tantalum content.

Image of FIG. 2.
FIG. 2.

Grain size as a function of Ta content.

Image of FIG. 3.
FIG. 3.

Theoretical lattice parameter as a function of tantalum content.

Image of FIG. 4.
FIG. 4.

Hardness and elastic modulus as a function of tantalum content.

Image of FIG. 5.
FIG. 5.

Calculated Young’s modulus and shear modulus.

Image of FIG. 6.
FIG. 6.

Partial density of states for (a) ZrN and (b) TaN.

Tables

Generic image for table
Table I.

Deposition conditions and elemental composition of sputtered TaZrN samples.

Generic image for table
Table II.

Mulliken charge and population for TaZrN films.

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/content/aip/journal/jap/99/5/10.1063/1.2178394
2006-03-03
2014-04-25
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Structural and mechanical properties of TaZrN films: Experimental and ab initio studies
http://aip.metastore.ingenta.com/content/aip/journal/jap/99/5/10.1063/1.2178394
10.1063/1.2178394
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