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Self-excited instability occurring during the nanoparticle formation in an low pressure radio frequency plasma
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10.1063/1.2179973
/content/aip/journal/jap/99/6/10.1063/1.2179973
http://aip.metastore.ingenta.com/content/aip/journal/jap/99/6/10.1063/1.2179973
View: Figures

Figures

Image of FIG. 1.
FIG. 1.

(Color online) Time evolution of the third harmonics and the self-bias voltage (a) in pure argon and (b) in argon-silane plasmas under standard conditions.

Image of FIG. 2.
FIG. 2.

(Color online) Time evolution of the instability (a) on the self-bias voltage and (b) on the third harmonics of the discharge current.

Image of FIG. 3.
FIG. 3.

(Color online) Time evolution of the frequency of the instability.

Image of FIG. 4.
FIG. 4.

(Color online) Time evolution of the self-bias voltage vs the injected power.

Image of FIG. 5.
FIG. 5.

(Color online) Beginning and duration of the instability as a function of the injected power.

Image of FIG. 6.
FIG. 6.

(Color online) Frequency at the beginning and at the end of the instability as a function of the injected power.

Image of FIG. 7.
FIG. 7.

(Color online) Time evolution of the self-bias voltage vs the silane flow rate. The curves are shifted on the self-bias voltage axis in order to have a better overview.

Image of FIG. 8.
FIG. 8.

(Color online) Beginning and duration of the instability as a function of the silane flow rate.

Image of FIG. 9.
FIG. 9.

(Color online) Frequency at the beginning and at the end of the instability as a function of the silane flow rate.

Image of FIG. 10.
FIG. 10.

(Color online) Time evolution of the self-bias voltage vs the temperature. The curves are shifted on the self-bias voltage axis in order to have a better overview.

Image of FIG. 11.
FIG. 11.

(Color online) Beginning and duration of the instability as a function of the gas temperature.

Image of FIG. 12.
FIG. 12.

(Color online) Time evolution of the frequency of instability vs the temperature. The time scale has been normalized by the instability duration to have a significant overview.

Image of FIG. 13.
FIG. 13.

(Color online) Particular case of the instability on the self-bias voltage (a) on the plasma duration. (b) Zoomed image of the first part of the curve.

Image of FIG. 14.
FIG. 14.

(Color online) Time evolution of the frequency of the instability in the particular case.

Image of FIG. 15.
FIG. 15.

Time evolution of the electron density for different gas temperatures. The insert is a zoom of the early beginning of the curve.

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/content/aip/journal/jap/99/6/10.1063/1.2179973
2006-03-17
2014-04-20
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Self-excited instability occurring during the nanoparticle formation in an Ar–SiH4 low pressure radio frequency plasma
http://aip.metastore.ingenta.com/content/aip/journal/jap/99/6/10.1063/1.2179973
10.1063/1.2179973
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