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The impact of the density and type of reactive sites on the characteristics of the atomic layer deposited films
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10.1063/1.2182074
/content/aip/journal/jap/99/6/10.1063/1.2182074
http://aip.metastore.ingenta.com/content/aip/journal/jap/99/6/10.1063/1.2182074
/content/aip/journal/jap/99/6/10.1063/1.2182074
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/content/aip/journal/jap/99/6/10.1063/1.2182074
2006-03-28
2014-10-26
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: The impact of the density and type of reactive sites on the characteristics of the atomic layer deposited WNxCy films
http://aip.metastore.ingenta.com/content/aip/journal/jap/99/6/10.1063/1.2182074
10.1063/1.2182074
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