Noncharged molecule trajectory within diffusion and kinetic regions. Kinetic and continuum models are implemented on the inside and outside of the vacuum sphere with radius , respectively.
(a) Particle charges (normalized by the magnitude of the electron charge) vs time. (b) The layer growth rates vs time. (c) Thickness of the amorphous carbon layer vs time calculated for .
(a) Spatial distribution of the potential . , quasi-steady-state. (b) Cumulative charge distribution in the continuum region compared to the magnitude of effective charge accumulated within the vacuum sphere.
Quasi-steady-state concentration distributions for electrons and all the ions together.
Concentration distributions for principal species at .
(a) Comparison of particle charging process at various pressures. (b) Quasi-steady-state cumulative charge distribution for different pressures. (c) Normalized radial charge distribution as a function of , with , for various pressures. All other parameters are kept constant.
(a) Particle charges for different particle radii. (b) Electric potential vs distance from the vacuum sphere surface. All the other parameters are kept constant. (c) Growth rate as a function of time for different particle radii.
Species participating in the reaction mechanism. Atoms, radicals, and molecules are neutral.
The reaction mechanism.
Reaction rates in Eq. (2).
Lennard-Jones parameters and polarizabilities of various species.
Boundary conditions for all species.
Transport coefficients and parameters for . is taken as an example of an ion.
Sensitivity study for moderate variation of , for and . All calculated values are given at steady states.
Summary of results for different pressures. All calculated values are given at steady states.
Effect of different particle radii. All calculated values are given at steady states.
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